Mechanical Engineering (MECH) Courses>Microelectromechanical Systems

MECH466 - Microelectromechanical Systems

Description

Principles of MEMS theory, design and fabrication. Topics include: scaling law principles: micro-mechanical structures for sensing and actuation; electrostatic, micro-thermal, piezoresistive, piezoelectric and micro-magnetic devices; micro-fluidics; micro-optics; microassembly and packaging. Case studies of MEMS device operation and micro-fabrication.

*Indicates four 3-hour labs.

Units

1.5

Hours: lecture-lab-tutorial

3-1*-1

Prerequisites

  • Complete all of the following
    • Complete 1 of:
      • MECH285 - Properties of Engineering Materials (1.5)
      • ECE220 - Electrical Properties of Materials (1.5)
      • ELEC220 - Electrical Properties of Materials (1.5)
    • Complete 1 of:
      • ECE216 - Electricity and Magnetism (1.5)
      • ELEC216 - Electricity and Magnetism (1.5)
      • PHYS216 - Introductory Electricity and Magnetism (1.5)
    • Complete 1 of:
      • ECE250 - Linear Circuits I (1.5)
      • ELEC250 - Linear Circuits I (1.5)

Course offered by

Department of Mechanical Engineering

Course schedules

Summer timetable available: February 15. Fall and Spring timetables available: May 15.

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